Main description:

BioNanoFluidic MEMS explains biosensor development fundamentals and initiates an awareness in engineers and scientists who would like to develop and implement novel biosensors for agriculture, biomedicine, home land security, environmental needs, and disease identification. In addition, the material covered in this book introduces and lays the basic foundation for design, fabrication, testing, and implemention of next generation biosensors through hands-on learning.

Feature:

Comprehensively shows the interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS

Covers BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies

Includes hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others

Provides complete coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration

Back cover:

BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes:

• BioNanoFluidic MEMS connection between the interdisciplinary nature of
  BioNanoFluidics and MEMS
   








• BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies

• Hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others

• Interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS

• BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
  








• Discussion of fabrication processes for implementation of biosensor and nanochemical sensors including the clean room lithography process, etching, chemical vapor deposition, electroplating, microsensor systems lamination, PDMS moulding, parylene deposition, and others

• Selected coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration
  

"The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical,electrical, optical, or fluidic elements on a common microfabricated
substrate to create sensors, actuators, and microsystems. This series,authored by leading MEMS practitioners, strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner."

STEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emiritus

Contents:

Nanotechnology: Retrospect and Prospect.- Synthesis of Oxide Nanostructures.- Nanolithography.- Nano/Microfabrication Methods for Sensors and NEMS/MEMS.- Micro- and Nanomanufacturing via Molding.- Temperature Measurement of Microdevices using Thermoreflectance and Raman Thermometry.- Stereolithography and Rapid Prototyping.- Case Studies in Chemical Sensor Development.- Engineered Nanopores.- Engineering Biomaterial Interfaces Through Micro and Nano-Patterning.- Biosensors Micro and Nano Integration.