Main description:

The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world.

The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including:

Thin-film integrated passives as an alternative to discrete passives
The possibility of piezoelectric MEMS
Solutions for MEMS gyroscopes
Advanced interconnect technologies
Ambient energy harvesting
Bulk acoustic wave resonators
Ultrasonic receiver arrays using MEMS sensors
Optical MEMS-based spectrometers
The integration of MEMS resonators with conventional circuitry
A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns
Wireless microactuators to enable implantable MEMS devices for drug delivery
MEMS technologies for tactile sensing and actuation in robotics
MEMS-based micro hot-plate devices
Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring
Sensors using passive acousto-electric devices in wired and wireless systems

Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.

Contents:

Breakthrough Technology: Microsystems to Nano-Microsystems: A Technological Breakthrough. HfO2-Based High- Dielectrics for Use in MEMS Applications. Piezoelectric Thin Films for MEMS Applications. CMOS Systems and Interfaces for sub-deg/hr Microgyroscopes. Bulk Acoustic Wave Gyroscopes. Mechanically Flexible Interconnects and TSVs: Applications in CMOS/MEMS Integration. Modeling of Piezoelectric MEMS Vibration Energy Harvesters. Interface Circuits for Capacitive MEMS Gyroscopes. Electromechanical Loops for High-Performance and Robust Gyroscope System Design. MEMS-Based Novel Applications: Bulk Acoustic Wave Resonators for Mobile Communication Systems. Wideband Ultrasonic Transmitter and Sensor Array for In-Air Applications. MEMS-Based Lamellar Grating Fourier Transform Spectrometers. Microelectromechanical Resonators for RF Applications. Rigid Body Motion Capturing by Means of Wearable Inertial and Magnetic MEMS Sensor Assembly-From Reconstitution of the Posture toward Dead Reckoning: An Application in Bio-Logging. Radio-Controlled Wireless MEMS Actuators and Applications. Advanced MEMS Technologies for Tactile Sensing and Actuation. MEMS-Based Micro Hot-Plate Devices. A Wireless Sensor Networks Enabled Inertial Sensor. Passive Radio-Frequency Acoustic Sensors and Systems for Wired and Wireless Applications. Index.